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High-class ALD device of Ke-micro helps scientists to achieve significant innovation
分类:Industry News  6583次浏览  发表时间:2014-12-10 16:08:20

Professor Zhang Wei in Fudan University successfully developed Semi-Floating-Gate Transistor (SFGT) with his team, the papers were published on the most authoritative international journal “Science”. The SFGT can be used in much area, potential value reaches more than $30 billion. Encouragingly, the key component of SFGT was made by Ke-micro ALD. This device have been sold to Peking University , Fudan University, Xi 'an Electronic Science and Technology University,  Nan Jing University and other research institutions, and also it was exported to United States due to its perfect performance. The result shows we have broken the restrictive situation in high-class equipment production, We are able to development and innovation independently.